Technical specifications

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Front sideTouch screen display
Rear sidePower 230 V, 50/60 Hz
Socket outlet for vacuum pump 230 V, 50/60Hz, max. 6,3 A
Process gas connector 4 mm x 1 mm
Vacuum connector for DN KF16
Sputtering parameters Thickness continuously selectable from 1 to 50 nm
Drying parameters Vacuum level selectable from 5 Pa to 300 Pa
Process time selectable from 1 to 240 minutes
Average working distance 40 mm
Target size Ø 30 mm
Target materials supported Au, Au/Pd, Pd, Ag
Electrical supply115V&230V, 50&60 Hz, max. 500 W including pump
Power consumption without pump 120 W
Gas supply Air or argon (pressure: 0.6 bar)
Weight and dimensions10.8 kg, W x D x H = 340mm x 305mm x 290mm
Process chamber Borosilicate glass Ø 100 mm x 150 mm height
Implosion shield PET Ø 120 mm x 150 mm height
Supplied with the unit 1 gold target Ø 30 mm, thickness 100 µm (99,999% purity)
1 recipient boron silicate glass
2 rubber seals
1 implosion shield
1 top lock (sample preparation stand)
1 power cord
1 instruction and safety manual
Vacuum pump Can be ordered separately as “pump kit” including
Two-stage roughing-pump with a pump capacity of 4.8 m³/h
Vacuum hose, DN KF16, length 1 m
2 x Fittings DN KF16
2 x Seals DN KF16
1 x Oil mist filter
Accessories Top lock for Thermo PHENOM sample holders
Spare Parts Target 30 mm (gold, gold/palladium)