Technical specifications
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| Front side | Touch screen display |
| Rear side | Power 230 V, 50/60 Hz Socket outlet for vacuum pump 230 V, 50/60Hz, max. 6,3 A Process gas connector 4 mm x 1 mm Vacuum connector for DN KF16 |
| Sputtering parameters | Thickness continuously selectable from 1 to 50 nm |
| Drying parameters | Vacuum level selectable from 5 Pa to 300 Pa Process time selectable from 1 to 240 minutes |
| Average working distance | 40 mm |
| Target size | Ø 30 mm |
| Target materials supported | Au, Au/Pd, Pd, Ag |
| Electrical supply | 115V&230V, 50&60 Hz, max. 500 W including pump Power consumption without pump 120 W |
| Gas supply | Air or argon (pressure: 0.6 bar) |
| Weight and dimensions | 10.8 kg, W x D x H = 340mm x 305mm x 290mm |
| Process chamber | Borosilicate glass Ø 100 mm x 150 mm height |
| Implosion shield | PET Ø 120 mm x 150 mm height |
| Supplied with the unit | 1 gold target Ø 30 mm, thickness 100 µm (99,999% purity) 1 recipient boron silicate glass 2 rubber seals 1 implosion shield 1 top lock (sample preparation stand) 1 power cord 1 instruction and safety manual |
| Vacuum pump | Can be ordered separately as “pump kit” including Two-stage roughing-pump with a pump capacity of 4.8 m³/h Vacuum hose, DN KF16, length 1 m 2 x Fittings DN KF16 2 x Seals DN KF16 1 x Oil mist filter |
| Accessories | Top lock for Thermo PHENOM sample holders |
| Spare Parts | Target 30 mm (gold, gold/palladium) |